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When CHC1 was lifting the slot #25 production wafer after dechuck, all other chambers were idle.\\r\\n2. 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Customer inform chamber suffer FDC alarm when ren recipe: 2NSBARCFALOXTV3WH40AF at step4.\\r\\n2. Check CFM found bad run shunt lower than good run ~ 0.1. \\r\\n3. Replace new bias match, recover ok.\\r\\n4. H', '2026-03-03 09:13:26', NULL<\/strong>, '2026-03-03 00:00:00', '\u5df2\u5be9\u6838', '\u540c\u610f', '1772564454_5884', '809B3ABE-FFE4-D430-E218-922774BB0CE8', '2026-03-04 03:00:54', '2026-03-04 03:00:54')"},{"name":"Query","component":"Database","start":1772564454.16163,"duration":"0.003321","query":"INSERT<\/strong> INTO<\/strong> `raw_employee_overtime_sheet` (`employee_no`, `todolist_no`, `ot_date`, `start_date`, `end_date`, `rest_hour`, `apply_hour`, `create_desc`, `application_date`, `approve_comment`, `approve_date`, `status`, `approve_st`, `batch_no`, `overtime_sheet_uuid`, `ct`, `ut`) VALUES<\/strong> ('183336_27', '202602120134', '2026-01-17', '2026-01-17 10:00:00', '2026-01-17 18:00:00', NULL<\/strong>, '8.00', '1\/8 - 1hr\\r\\nSR report\\r\\n1\/12 - 3hrs\\r\\nMonthly meeting report, AVL reporting, N17 V18 T\/S\\r\\n1\/13 - 1hr\\r\\nEchuck BKM report\\r\\n1\/15 - 2hrs\\r\\nN22 Echuck fatal failure issue\\r\\nParts order and return\\r\\n1\/19 - 1hr\\r\\nT', '2026-03-03 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